![metal gate process flow](https://host.easylife.tw/pics/201212/Czech22_IronGate/IMG_2727.jpg)
由LWu著作·2013—OnestepfromtypicalCMOSprocessflowisthesource/drain(S/D)activationannealing,whichthegatestackmustundergo.ThetypicalS/D ...,Ametalgate,inthecontextofalateralmetal–oxide–semiconductor(MOS)stack,isthegateelectrodeseparatedbyanoxidefrom...
A routine replacement gate process flow Figure 2. Growth ...
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Wangetal.studiedtheALDWonTiNusingSiH4andB2H6asthemetalforfillingthehighaspectratiogapofthereplacementgate[88,89].Agoodgapfilling ...
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